Technologies

Equipment Summary

Transmission Electron Microscopes

  • JEM-2100 Plus with LaB6
  • JEM-ARM300F (Grand)
  • JEM-1400 Plus
  • JEM-ARM300F (Environmental)
  • JEM-F200

Scanning Electron Microscopes

  • Phemon ProX
  • JSM-7800F Prime
  • JSM-6010 Plus/LA
  • JIB-4700F
  • JAMP-9510F

Support Preparation Equipment

  • Ex-situ Pickup system
  • General Sample Holders
  • Environmental and In-situ Sample Holders
  • IB-19520CCP

Transmission Electron Microscopes

200 and 120 kV TEM with LaB6

JEM-2100 Plus

  • Gun: LaB6
  • Resolution: TEM dot 0.19nm, lattice 0.14nm, STEM DF ~ 1nm
  • Magnification: ×3,000 ~ × 2,500,000
  • STEM: JEOL STEM system
  • Detector: HAADF Detector
  • EDS: Oxford X-MAX N 100 TLE , Energy resolution 133eV
  • Chamber Camera: JEOL high Sensitive CMOS camera (flash camera)
  • Bottom mount TVIPS CCD: TemCam-XF416
  • Camera length: Extension up to 3,500mm
  • Image area: 63.5 × 63.5 mm² (16M pixel); High sensitivity; High acquisition speed with large dynamic range.

300 kV Scanning TEM with double Cs correctors

Grand JEM-ARM300F

  • Electron-GUN: Hyper Cold FEG
  • Brightness: ≧1 × 109 A/cm2 sr (at 300 kV)
  • Pole Piece: Wide GAP (f = 3.6mm, Cs = 1.6mm, Cc = 2.4mm)
  • Acc. Vol. : 300kV, 80kV, 60kV, 40kV
  • Cs Corrector: TEM & STEM Corrector
  • Resolution: TEM Lattice 0.06nm,; STEM BF 0.063nm; STEM DF 0.063nm
  • Magnification: × 2,000 ~ × 1,200,000
  • Camera length: 8 cm ~ 200 cm
  • Detector: BF, LAADF, Hybrid HAADF, 8-Segmented (SAAF)
  • 3D Tomography system
  • EDS: JEOL SDD system (100mm2 × 2)
  • Energy res.: 133eV @Mn K
  • Bottom Camera: Gatan 16M Oneview IS Camera
  • Chamber Camera: Viewing Chamber CCD Camera (JEOL)
  • EELS: Gatan 965 GIF Quantum ER
  • Cooling Holder: Gatan 676

120 kV Microscope

JEM-1400 PLUS

  • Electron Gun: LaB6
  • Acc. Vol. : 120 kV
  • Resolution: TEM Point 0.33 nm, TEM Lattice 0.14 nm; STEM BF 1.5 nm
  • Magnification: × 10,000 ~ × 2,000,000 (Mag mode)
  • EDS: JEOL SDD system (30 mm2 × 1)
  • Solid Angle: 0.18 str
  • Detectable element range: B ~ U
  • Camera : JEOL high Sensitive CMOS Camera (flash camera)
  • Effective pixels: 2,048 (H) × 2,048 (V)
  • Read-out rate: 30 fps (all pixels read out)

In-situ Microscope with differential pumping system

JEM-ARM300F

  • FE-Gun: Hyper Cold FEG
  • Brightness: ≧1 × 109 A/cm2 sr (at 300 kV)
  • Pole Piece: Wide GAP PolePiece (f = 3.6 mm, Cs = 1.6mm, Cc = 2.4mm)
  • Acc. Vol. : 300kV, 200kV, 80kV, 40kV(TEM)
  • Cs Corrector: TEM Corrector
  • Resolution: TEM Lattice 0.06nm, STEM BF 0.2nm, STEM DF 0.2nm
  • Magnification: × 2,000 – ×1,200,000 (MAG Mode)
  • Camera length: 8cm to 300cm
  • Detector: Pixelated Detector (4D Canvas); Annular BF Detector; LAADF Detector; HAADF Detector
  • Gonio (x-tilt) modification for 3D-EDT: Min. tilt speed 0.05˚/sec, 3D Tomography system
  • Stage TMP Pumping: SIP/TMP Dual Pumping System for In-situ
  • EDS: JEOL SDD system (158mm2 × 1) Energy resol: 133eV @MnK
  • Bottom Camera: Gatan Oneview IS Camera
  • Chamber Camera: Viewing Chamber CCD Camera (JEOL)
  • EELS: Gatan977 Dual EELS Enfinium

High Resolution Multi-purpose Microscope

JEM-F200

  • Electron-Gun: Schottky Electron Gun
  • Brightness: ≧4 × 108 A/cm2 sr (at 200 kV)
  • Pole Piece: HR Pole-Piece (f=2.3mm, Cs=1.0mm, Cc= 1.4mm)
  • Acc. Vol. : 200kV, 80kV
  • Resolution: TEM Point 0.23nm; TEM Lattice 0.1nm; STEM DF 0.19nm
  • Magnification: × 4,000 – ×2,000,000 (Mag mode)
  • Probe Current @200kV: 2.5 nA at 1.0 nm
  • Camera length: 15cm to 350cm
  • Bottom Camera: Gatan Rio 1816 (IS)
  • EDS: JEOL SDD system (100mm2 x1)
  • Solid Angle: 1sr
  • Resolution (FWHM): 133 eV (at 55Fe, 5.9 keV, 1,000 cps)
  • Detectable element range: B to U
  • Bottom Camera: Gatan Rio 1816 (IS)

Scanning Electron Microscopes

Tabletop SEM

Phemon ProX

  • Model: Phemon ProX with EDS .
  • Acceleration voltage: 5 kV, 10 kV, 15 kV
  • Magnification: × 20 - × 150,000
  • Resolution: 17nm
  • Filament: CeB6
  • Detector: BSD, EDS
  • Specialty: Quick imaging; Sample check and quick imaging after synthesis; Direct observation of insulators.
  • Operation Times: 20-30 hrs/week
  • Independent Users: 59 users (including PI, staff scientist, post-doctoral, graduate/undergraduate student)

High Resolution SEM with low vacuum capability

JSM-7800F Prime

  • In-lens Schottky Plus Field Emission Electron Gun: Maximum Beam Current: 20 nA 2kV / 500 nA 30 kV
  • Super Hybrid Lens (SHL): low-acceleration / high-resolution observation EBSD analysis
  • Gentle Beam Super High Resolution (GBSH): Maximum sample bias voltage: -5 kV
  • Back Scattered Electron detector: RBEI detector (retractable)
  • Chamber Camera: CMOS camera system
  • Low Vacuum with secondary electron detector for LV
  • Resolution: 0.7 nm (15 kV), 0.7 nm (1 kV)、3.0 nm (5 kV、WD10 mm、5 nA)
  • Oxford EDS : X-Max Extreme
  • Electron Beam Lithography system: Raith ELPHY Quantum

Tungsten filament

JSM-6010 PLUS/LA

  • Electron Gun: W-hairpin
  • Acc. Vol. : 0.5 kV to 20 kV
  • SEI Resolution: 4 nm at 20 kV; 5 nm at 20 kV (LV Mode)
  • Magnification: ×8 ~ × 300,000
  • Probe current: 1 pA ~ 0.3 A
  • Vacuum range: 10 ~ 100 Pa (LV mode)
  • Stage Movement: 5 axis (X,Y: Motorised)
  • EDS: JEOL SDD system (10mm2 )
  • Detectable elements: B ~ U
  • Energy Resolution: 133eV @Mn Kα

Multi-Beam Focussed Ion Beam System

JIB-4700F

  • Gun: In-lens Schottky Electron Gun
  • Lens system: Hybrid Lens/HL; GB (Gentle Beam Mode)
  • Detector: LED, USD, UED, RBED
  • SEM Resolution: 1.2nm @ 15 kV with GB; 3.0nm @ 0.1kV with GB
  • FIB Resolution: 4.0nm @ 30kV
  • Image magnification: ×50 to 300,000 (in FIB); ×20 to 1,000,000 (in SEM mode)
  • Acc. Voltage: SEM mode 0.5 to 30.0 kV; GB mode 0.1 to 29.9 kV
  • Beam current: 1pA to 300nA (SEM); 1pA to 90nm (Ion Beam)
  • Sample Transfer System: without exposing to air - Ex-situ Pick-up System

Field emission Auger Microprobe

JAMP-9510F

  • Gun: Schottky Field Emission Electron Gun
  • Accelerating voltage: 0.5 ~ 30 kV
  • SEI Resolution: 3.0nm
  • Auger Analysis Spatial Resolution: 8.0nm
  • Magnification: ×25 ~ ×500,000
  • Variable Energy Resolution: 0.05% ~ 0.6%
  • Sensitivity: 120,000 cps/ch or more
  • Analyser: Hemi-Spherical Electrostatic Analyser (HAS)
  • Ultimate vacuum pressure: 5 x 10–8 Pa
  • Ion energy: 0.01 ~ 4 keV
  • Ion-beam current: 2 μA or more at 3,000 eV 0.03 μA or more at 10 eV
  • Sample Transfer System: Without exposing a sample to air

Other Equipment

Ex-situ Pickup And Transfer System

AxisPro

Prepare a block specimen using FIB milling

Transfer the block specimen to a plate by pick-up system

Prepare a TEM lamella by FIB

Sample Holders

Single Tilt Holder (JEOL)

914 High tilt Cooling Holder (Gatan)

High Tilt Holder (JEOL)

Specimen Tilting Holder (JEOL)

Environmental and In-situ Sample Holders

Protochips Atmosphere

  • Pressure range : 3 to 760 Torr
  • Heating range : RT to 1000 ℃

Protochips Poseidon

  • Includes electrochemistry package
  • Electrodes : 3
  • Liquid ports : 3 (mixing)

JEOL Gas Nozzle Heating Holder

  • Heating range : RT to 1,000 ℃
  • Tilting angle: X:+/-25 degree

Hysitron PI-95 tem PicoIndenter

  • Max Force : 1500uN
  • Max Displacement : 5000nm

Cross Section Polisher with cooling system

IB-19520CCP

  • TBD